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系統識別號 U0002-2708201216385300
中文論文名稱 摻雜離子對ITO光學性質的影響
英文論文名稱 Effect of doped-ion on optical properties of indium tin oxides
校院名稱 淡江大學
系所名稱(中) 機械與機電工程學系碩士班
系所名稱(英) Department of Mechanical and Electro-Mechanical Engineering
學年度 100
學期 2
出版年 101
研究生中文姓名 尹瑞蓮
研究生英文姓名 Jui-Lien Yin
學號 600370190
學位類別 碩士
語文別 中文
口試日期 2012-06-26
論文頁數 61頁
口試委員 指導教授-林清彬
委員-蔡有仁
委員-張子欽
中文關鍵字 摻雜  氧化銦錫        顏色 
英文關鍵字 doping  indium tin oxide  iron  cobalt  nickel  colour 
學科別分類 學科別應用科學機械工程
中文摘要 本研究使用共析出法已成功製備摻雜鐵、鈷及鎳之氧化銦錫粉末,其摻雜濃度分別為3.8at.%及6at.%,並探討摻雜離子對氧化銦錫粉末之晶相及顏色影響。實驗結果,由XRD繞射儀,各種摻雜離子不會改變氧化銦錫之特徵峰值。摻雜鐵、鈷及鎳形成淡黃綠色、褐灰及藍灰色。另外,粉末經氫氣還原和真空高溫加熱,摻雜鐵離子之ITO粉末形成藍灰色;摻雜鈷及鎳離子之顏色與未加熱前相同,因為鈷及鎳離子進入晶體結構之中加強了與氧的鍵結,導致不易產生氧空缺。
英文摘要 The present study has been successful fabricated the 3.8 at.% and 6 at.% Fe, Co, Ni -doped ITO powder using by co-precipitation method, and probed the effect of crystal phase and colour of doped ITO powder. The experimental results showed that the doped ions would not change the ITO’s characteristic diffraction peaks using by XRD diffraction analysis, but the doped ions will change the powder’s colour due to colour center effect which doped iron, cobalt and nickel will form the light yellow-green, gray-brown, and blue-gray, respectively. In addition, the powder thought hydrogen reduced and vacuum heating treatment, the colour of Fe-doped ITO powder turns into the blue-gray, and the colour of Co- and Ni- doped ITO powder are change less due to the cobalt and nickel ions diffused into the crystal structure and then strengthen the bonding with oxygen, that result effect of the oxygen vacancies more difficult to form.
論文目次 總目錄
中文摘要...........................................................................................I
英文摘要..........................................................................................II
總目錄.............................................................................................III
圖目錄............................................................................................VI
表目錄...........................................................................................VIII
符號說明.........................................................................................IX
壹、導論.........................................................................................1
1.1 前言..........................................................................................1
1.2 文獻回顧....................................................................................2
1.2.1 氧化銦In2O3介紹......................................................................2
1.2.2 氧化銦錫介紹............................................................................3
1.2.2.1 導電性質...............................................................................4
1.2.2.2 能隙結構...............................................................................6
1.2.2.3 Sn的摻雜濃度對ITO的影響......................................................7
1.2.2.4 光學性質...............................................................................8
1.2.3 ITO粉末的製備方法..................................................................12
1.2.3.1 傳統粉碎法..........................................................................12
1.2.3.2 固相反應法..........................................................................13
1.2.3.3 水熱法.................................................................................13
1.2.3.4 溶膠凝膠法..........................................................................14
1.2.3.5 沉澱法.................................................................................16
1.3 動機目的.....................................................................................18
貳、實驗設計....................................................................................26
2.1實驗材料與設備...........................................................................26
2.1.1 實驗材料..................................................................................26
2.1.2 實驗設備..................................................................................26
2.2 實驗步驟....................................................................................27
2.2.1 ITO奈米粉體製作.....................................................................27
2.2.2 ITO粉末氫還原及真空處理........................................................28
2.3 性質測試....................................................................................28
2.3.1 X光繞射分析...........................................................................28
2.3.2 EDAX分析..............................................................................29
参、結果與討論.............................................................................32
3.1 摻雜離子進入ITO晶體.................................................................32
3.1.1 X光繞射分析............................................................................33
3.1.2 EDAX成分分析.......................................................................33
3.2 製作過程中引發顏色的改變...........................................................34
3.3 熱處理造成的顏色變化................................................................36
3.3.1 在450℃空氣中熱處理後顏色的改變............................................36
3.3.2 在250℃氫氣中熱處理後顏色的改變............................................39
3.3.3 在400℃真空中熱處理後顏色的改變............................................40
肆、結論.................................................. ........................................56
伍、參考文獻............................................... ...................................58

圖目錄
圖1.1 In2O3晶體結構圖..................................................................19
圖1.2 CaF2晶體結構圖...................................................................19
圖1.3 In2O3中b site及d site銦離子周圍的氧離子配置........................20
圖1.4 Nath等人製造的ITO薄膜和In2O3薄膜XRD比較圖.......................21
圖1.5 In2O3摻錫的能隙模型............................................................22
圖1.6 不同摻錫濃度及氧分壓下處理的ITO薄膜的載子濃度.................23
圖1.7 典型ITO薄膜穿透、反射及吸收光譜圖.....................................24
圖1.8 In2O3與摻雜Sn之後的拋物線能隙結構....................................25
圖2.1 使用共析出方法製作ITO粉末之流程圖.......................................31
圖3.1 摻雜離子在In2O3晶體結構中可能置換的位置示意圖.................41
圖3.2 摻雜離子進入In2O3晶體結構後造成的影響..............................42
圖3.3 不同摻雜濃度Fe ITO粉末之XRD繞射分析圖...........................43
圖3.4 不同摻雜濃度Co ITO粉末之XRD繞射分析圖...........................43
圖3.5 不同摻雜濃度Ni ITO粉末之XRD繞射分析圖............................44
圖3.6 使用共析出方法製備摻雜鐵ITO之顏色變化...............................45
圖3.7 使用共析出方法製備摻雜鈷ITO之顏色變化...............................46
圖3.8 從溶液取出清洗烘乾後的摻雜ITO粉末之顏色改變.....................47
圖3.9 使用共析出方法製備摻雜鎳ITO之顏色變化...............................48
圖3.10 摻雜的ITO粉末在450℃熱處理前之XRD繞射分析圖...................49
圖3.11 摻雜的ITO粉末在450℃熱處理後之XRD繞射分析圖...................49
圖3.12 ITO粉末經氫還原後及真空加熱後之照片...............................50
圖3.13 ITO粉末經真空油壓機加熱加壓後之照片...............................50
圖3.14 摻雜3.8 at.% Fe ITO粉末經氫還原及真空加熱之照片...........51
圖3.15 摻雜6 at.% Fe ITO粉末經氫還原及真空加熱之照片..............51
圖3.16 摻雜3.8 at.% Co ITO粉末經氫還原及真空加熱之照片...........52
圖3.17 摻雜6 at.% Co ITO粉末經氫還原及真空加熱之照片..............52
圖3.18 摻雜3.8 at.% Ni ITO粉末經氫還原及真空加熱之照片............53
圖3.19 摻雜6 at.% Ni ITO粉末經氫還原及真空加熱之照片...............53

表目錄
表3.1 各種摻雜ITO粉末經不同熱處理之顏色變化.............................54
表3.2 6 at.% 摻雜Fe ITO粉末之EDAX.............................................55
表3.3 6 at.% 摻雜Co ITO粉末之EDAX.............................................55
表3.4 6 at.% 摻雜Ni ITO粉末之EDAX..............................................55
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