本研究使用parylene C材料沈積步階覆蓋良好之特性，將其均勻鍍著於犧牲層(sacrificial layer)毛細玻璃管三維表面上，隨後利用氫氟酸(HF)移除犧牲層，完成一具有圓形橫截面之parylene C高分子薄膜挫曲式導管。該導管利用彎折區阻擋流體，成為構型簡明，不需額外防漏設計且具有零值無益體積(zero dead volume)特性之挫曲式(buckled-type)閥門。
隨後利用SU-8厚膜光阻為材料，多次曝光同次顯影為手法，設計與製作parylene圓管挫曲式微型閥門之可行性驗證模組與仿生式驅動模組。前者成功驗證「彎折導管」原理可止逆流體，實現閥門之功能性；後者則提供以液體表面張力為動力源之元件，使parylene圓管挫曲式閥門彎折區產生角度變化。
成功製備之parylene圓管挫曲式微型閥門，預期進行微流體(microfluidics)的控制，進而應用於生醫實驗室晶片(lab-on-a-chip)。

This thesis proposes a novel parylene bucked-type valve, which is based on the parylene C technology of good step-coverage characteristic. First conformally depositing the parylene C thin film on sacrificial material of capillary glass tubes, then we remove the embedded capillary tubes via HF acid to obtain the buckled-type circular microchannel of parylene C.
 The buckled region stops the flow of liquid, and there is no need of adding sealing parts into the buckled-type valve with almost zero dead volume. Afterwards we integrate SU-8 photolithography into the parylene C process to fabricate a test module for feasibility study and a biomimic driving module of the buckled-type valve. The feasibility test module demonstrates that the parylene buckled-type valve has the same working principle as the “buckled straw”. Meanwhile, the biomimic driving module using surface tension-force makes the actuation angle of buckled region apparent and approves the functionality of the valve device.
Finally, the fabricated parylene buckled-type valves expect to perform as a component to control microfluidics flow and then apply to lab-on-a-chip.

目 錄
中文摘要	-----------------------------------------------------------------------	I

英文摘要	-----------------------------------------------------------------------	II

目錄	-----------------------------------------------------------------------	III

圖目錄	-----------------------------------------------------------------------	V

表目錄	-----------------------------------------------------------------------	VIII

第一章	緒 論---------------------------------------------------------------	1
	1-1 研究動機-----------------------------------------------------	1
	1-2 文獻回顧-----------------------------------------------------	3
	1-3 研究目的-----------------------------------------------------	6
	1-4 各章提要-----------------------------------------------------	10
第二章	圓管挫曲式微型閥門可行性驗證模組之設計與製作-----	11
	2-1 材料之選擇：parylene-------------------------------------	11
	2-1-1 簡介與特點------------------------------------------	11
	2-1-2 相關微機電應用------------------------------------	12
	2-2 可行性驗證模組之設計內涵-----------------------------	14
	2-3 各類玻璃管材質之蝕刻試驗-----------------------------	21
	2-4 可行性驗證模組之製作程序-----------------------------	23
	2-5 可行性驗證模組之製作成果-----------------------------	31
第三章	可行性驗證模組之測試與結果分析--------------------------	36
	3-1 實驗量測設備架設說明-----------------------------------	36
	3-2 測試方法-----------------------------------------------------	40
	3-3 量測結果與分析--------------------------------------------	42
	3-3-1 出口流率對應於彎折角度之變化關係---------	42
	3-3-2 各類材質與尺寸之挫曲式閥門止逆角度的比較---	46
第四章	圓管挫曲式微型閥門驅動模組之設計與製作--------------	47
	4-1閥門仿生驅動模組------------------------------------------	47
	4-1-1 驅動方式---------------------------------------------	48
	4-1-2 材料選擇---------------------------------------------	53
	4-1-3 設計內涵---------------------------------------------	56
	4-2 驅動模組之製作程序--------------------------------------	61
	4-3 驅動模組之製作成果--------------------------------------	70
	4-4 製程問題與解決方法--------------------------------------	78
第五章	驅動模組之測試與結果分析-----------------------------------	82
	5-1實驗量測設備架設說明------------------------------------	82
	5-2測試方法------------------------------------------------------	84
	5-3量測結果與分析---------------------------------------------	85
	5-3-1 未整合parylene彎折導管------------------------	87
	5-3-2 整合parylene彎折導管---------------------------	90
第六章	結論與未來建議--------------------------------------------------	93
	6-1 結論-----------------------------------------------------------	93
	6-2 未來方向與建議--------------------------------------------	96
參考文獻	-----------------------------------------------------------------------	101
附錄A	本研究“Buckled-type valves integrated by parylene micro-tubes”發表於國際期刊Sensors and Actuators A: physical之全文---------------------------------------------------	106
附錄B	未整合parylene彎折導管之挫曲式微型閥門驅動模組受液體驅動時，彎折角度ψ對應於環狀毛細結構長度之變化關係圖---	113
附錄C	彎折角度ψ的數學分析模式-----------------------------------	114

圖 目 錄
圖1-1	Sim等製作之氣動式微閥門------------------------------------	4
圖1-2	K. Hosokawa等製作之三路氣動式微閥門-------------------	5
圖1-3	Z. Hua等製作出之parylene三明治結構氣動式微閥門陣列----	6
圖1-4	大尺度及其彎折後之塑膠導管---------------------------------	7
圖1-5	第一代parylene挫曲式微閥門模組----------------------------	8
圖1-6	不同操作橫截面之挫曲式閥門---------------------------------	9
圖1-7	論文架構------------------------------------------------------------	10
圖2-1	Parylene熱挫曲式微型致動器----------------------------------	14
圖2-2	Tjerkstra等製作出接近半圓形之透明微流道----------------	16
圖2-3	L. J. Yang等製作出之矩形parylene微流道SEM圖--------	16
圖2-4	L. J. Yang等製作出之圓形parylene微流道SEM圖--------	16
圖2-5	L. J. Yang等製作出之圓形微流道製作流程圖--------------	17
圖2-6	以SU-8厚膜光阻封黏為一體之PE軟管與毛細玻璃管----	18
圖2-7	圓管挫曲式微型閥門可行性驗證模組設計示意圖---------	20
圖2-8	硼玻璃與其熱溶拉伸成為毛細玻璃管之實體圖------------	23
圖2-9	Parylene圓管挫曲式微型閥門可行性驗證模組之製程實體圖------------------------------------------------------------------	28
圖2-10	製作parylene挫曲式圓管微型閥門可行性驗證模組之膠片光罩---------------------------------------------------------------	30
圖2-11	硼質毛細玻璃管3D示意圖與SEM圖-------------------------	32
圖2-12	硼質毛細玻璃管包覆parylene之3D示意圖與SEM圖-----	33
圖2-13	Parylene圓管微閥門流道3D示意圖與SEM圖-------------	34
圖2-14	Parylene圓管挫曲式微型閥門可行性驗證模組-------------	35
圖3-1	量測實驗架設圖---------------------------------------------------	38
圖3-2	自行裝配之微閥門驅動平台------------------------------------	39
圖3-3	閥門模組彎折原理圖---------------------------------------------	41
圖3-4	閥門可行性驗證模組工作角度測試實驗之情形------------	41
圖3-5	微閥門驅動平台各部位水平校正------------------------------	44
圖3-6	Parylene圓管挫曲式微型閥門出口流率對應於彎折角度之變化關係---------------------------------------------------------	44
圖3-7	PE圓管挫曲式微型閥門出口流率對應於彎折角度之變化關係---------------------------------------------------------------	45
圖3-8	Parylene & PE圓管挫曲式微型閥門出口流率對應於彎折角度之變化關係------------------------------------------------	45
圖4-1	C. J. Kim等控制汞珠於SU-8流道內作動情形--------------	49
圖4-2	Y. C. Lee使用寬400、高600微米之錫球組裝多晶矽支架----	50
圖4-3	蕨類孢子囊致動機構原理---------------------------------------	50
圖4-4	圓管挫曲式微閥門驅動模組作動情形說明------------------	53
圖4-5	挫曲式微閥門驅動模組結合parylene圓管3D示意圖-----	56
圖4-6	形變產生區與高深寬比SU-8環狀毛細結構-----------------	57
圖4-7	Parylene圓管溝槽承載區----------------------------------------	58
圖4-8	結構補強區---------------------------------------------------------	59
圖4-9	驅動模組尺寸註記結構------------------------------------------	60
圖4-10	Parylene圓管挫曲式微閥門驅動模組製作程序-------------	66
圖4-11	Parylene圓管挫曲式微閥門驅動模組製程光罩-------------	68
圖4-12	金屬對準點製作流程與成果------------------------------------	70
圖4-13	第一層SU-8驅動模組定義區-----------------------------------	71
圖4-14	驅動模組藉由第三道光罩定義出之parylene圓管溝槽承載區------------------------------------------------------------------	73
圖4-15	挫曲式微閥門驅動模組----------------------------------------------	74
圖4-16	Parylene彎折導管與雙層SU-8驅動模組以光阻黏合之情形--	76
圖4-17	溫度效應對SU-8造成之影響-----------------------------------	79
圖4-18	雙層SU-8挫曲式微閥門驅動模組因與矽晶片熱膨脹量不匹配發生翹曲---------------------------------------------------	81
圖5-1	實驗量測架構圖---------------------------------------------------	83
圖5-2	挫曲式微閥門驅動模組彎折角度ψ之定義---------------	84
圖5-3	Parylene圓管挫曲式微型閥門驅動模組特徵尺寸說明圖---	86
圖5-4	挫曲式微型閥門驅動模組受液體驅動時，彎折角度ψ對應於環狀毛細結構長度之變化關係：未整合parylene彎折導---	90
圖5-5	挫曲式微型閥門驅動模組受液體驅動時，彎折角度ψ之變化對應於環狀毛細結構長度之變化關係：整合parylene彎折導管---------------------------------------------------------------------	92
圖6-1	Parylene圓管挫曲式微型閥門驅動模組改良構型示意圖---	100 
圖B-1	未整合parylene彎折導管之挫曲式微型閥門驅動模組受IPA驅動時，彎折角度ψ對應於環狀毛細結構長度之變化關係---	113
圖B-2	未整合parylene彎折導管之挫曲式微型閥門驅動模組受DI water驅動時，彎折角度ψ對應於環狀毛細結構長度之變化關係---------------------------------------------------------------	113
圖C-1	單一環狀毛細結構之彎折圖---------------------------------------	115

表 目 錄
表2-1	氫氟酸(49%)蝕刻石英玻璃、鋁玻璃、硼玻璃之結果----------	22
表3-1	各種材料之挫曲式閥門啟動角度---------------------------------	46
表4-1	應用於微機電高分子材料楊氏係數之比較---------------------	55
表4-2	SU-8相關機械材料特性--------------------------------------------	55
表5-1	受表面張力驅動測試之挫曲式微型閥門驅動模組特徵尺寸---	86
表5-2	未整合parylene彎折導管之挫曲式微型閥門驅動模組受液體驅動情形------------------------------------------------------------	89
表5-3	整合parylene彎折導管之挫曲式微型閥門驅動模組受液體驅動情形---------------------------------------------------------------	91

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