本論文針對小型晶片自動燒錄設備，提出一個基於最佳化演算法之模糊行為決策系統來提升設備的產量，主要探討設備模擬器與行為決策系統的設計與實現。在設備模擬器的設計實現上，本論文針對小型晶片自動燒錄設備，設計實現一個模擬器來模擬設備的產量。並且依據不同的晶片燒錄時間，探討不同平台配置方式與不同燒錄器配置數量的產量變化。在行為決策系統的設計上，本論文提出一個基於最佳化演算法之模糊行為決策系統。首先，本論文針對小型晶片自動燒錄設備的特性，提出一個兩個輸入一個輸出的模糊系統架構，讓設備能夠依據目前各個燒錄器的狀態來決定下一個適當的動作。然後使用遺傳演算法(GA)與粒子群最佳化(PSO)二種最佳化演算法來自動選取一組較佳之模糊系統參數值，使得這個所對應的模糊行為策略系統可以讓設備具有較佳的產量。最後，由實驗的結果可以看出，針對不同的晶片燒錄時間，所實現的設備模擬器確實可以提供一個方法來決定一個適當的平台配置方式與一個適當的燒錄器數量。並且所設計的行為決策系統確實可以提升設備產量，並且減低異常狀況對產量所造成的影響。

In this dissertation, an optimal algorithm-based fuzzy behavior decision system is proposed for a small-sized chip automatic programming equipment to improve the production capacity of equipment. Two main designed topics of equipment simulator and behavior decision system are studied. In the equipment simulator design, a simulator is designed and implemented for the small-sized chip automatic programming equipment to simulate its production capacity. Moreover, depending on different programming time, the change of production capacity is studied for different platform configuration and different number of programmers. In the behavior decision system design, an optimal algorithm-based fuzzy behavior decision system is proposed to improve the production capacity. First of all, based on characteristics of the small-sized chip automatic programming equipment, a two-inputs-and-one-output fuzzy system structure is constructed. It allows the equipment to determine a next appropriate action based on the current status of each programmer. Then two optimal algorithms of GA and PSO are applied to automatically select a better parameter set so that the corresponding fuzzy behavior decision system can let the equipment have a better production capacity. Finally from the simulation results, we can see that the implemented simulator can indeed provide a method to decide an appropriate platform configuration and an appropriate number of programmers for different programming time. And the proposed method can indeed improve the production capacity and reduce the impact in some abnormal conditions.

目錄 .............................................................................................................. I
圖目錄 ....................................................................................................... III
表目錄 ......................................................................................................VII
參數對照表............................................................................................... IX
第一章 緒論 ............................................................................................. 1
1.1 研究背景 ..................................................................................................... 1
1.2 研究目的 ..................................................................................................... 5
1.3 論文架構 ..................................................................................................... 8
第二章 設備模擬器 ................................................................................. 9
2.1 簡介 ............................................................................................................. 9
2.2 設備硬體架構與尺寸規格 ....................................................................... 10
2.3 動作流程 ................................................................................................... 12
2.4 設備模擬器系統架構 ............................................................................... 14
2.5 設備模擬驗證 ........................................................................................... 20
2.6 實驗與討論 ............................................................................................... 21
第三章 基於最佳化演算法之模糊行為決策系統 ............................. 38
3.1 簡介 ........................................................................................................... 38
3.2 模糊系統 ................................................................................................... 46
3.3 模糊系統參數的最佳化搜尋 ................................................................... 53
3.4 監督模組 ................................................................................................... 68
3.5 實驗與討論 ............................................................................................... 72
第四章 結論與未來展望 ....................................................................... 84
參考文獻 .................................................................................................... 88
附錄 ............................................................................................................ 93
研究著作 ..................................................................................................103
產學經歷 ..................................................................................................106
獲獎經歷 .........................................................................................108

圖目錄
圖 1.1、小型晶片自動燒錄設備整體架構 .............................................. 7
圖2.1、小型晶片自動燒錄設備硬體架構 ............................................ 10
圖2.2、Topline JEDEC 晶片盤[17] ....................................................... 11
圖2.3、取放系統的軸向示意圖 ............................................................ 12
圖2.4、原廠動作流程圖 ........................................................................ 13
圖2.5、設備模擬器系統架構圖 ............................................................ 14
圖2.6、桌板尺寸規格 ............................................................................ 15
圖2.7、晶片盤尺寸規格[16] .................................................................. 16
圖2.8、燒錄座尺寸規格 ........................................................................ 17
圖2.9、設備模擬器 ................................................................................ 20
圖2.10、晶片燒錄時間為0 秒的設備動作流程 .................................. 21
圖2.11、配置四台燒錄器及配置方式A 的桌板架構 ......................... 22
圖2.12、四台燒錄器及配置方式A於晶片燒錄時間10~120 秒之產量
圖 ................................................................................................. 23
圖2.13、配置四台燒錄器及配置方式B 的桌板架構 ......................... 24
圖2.14、四台燒錄器及配置方式B 於晶片燒錄時間10~120 秒之產量
圖 ................................................................................................. 24
圖2.15、配置四台燒錄器及配置方式C 的桌板架構 ......................... 25
圖2.16、四台燒錄器及配置方式C 於晶片燒錄時間10~120 秒之產量
圖 ................................................................................................. 25
圖2.17、四台燒錄器於三種配置方式之產量比較圖 .......................... 26
圖2.18、四台燒錄器的三種配置方式差異 .......................................... 26
圖2.19、配置八台燒錄器及配置方式A 的桌板架構 ......................... 27
圖2.20、八台燒錄器配置方式A於晶片燒錄時間10~120 秒之產量圖
..................................................................................................... 28
圖2.21、四台與八台燒錄器於配置方式A 的產量比較圖 ................. 28
圖2.22、配置八台燒錄器及配置方式B 的桌板架構 ......................... 29
圖2.23、八台燒錄器配置方式B 於晶片燒錄時間10~120 秒之產量圖
..................................................................................................... 29
圖2.24、四台與八台燒錄器於配置方式B 的產量比較圖 ................. 29
圖2.25、配置八台燒錄器及配置方式C 的桌板架構 ......................... 30
圖2.26、八台燒錄器配置方式C 於晶片燒錄時間10~120 秒之產量圖
..................................................................................................... 31
圖2.27、四台與八台燒錄器於配置方式B 的產量比較圖 ................. 31
圖2.28、八台燒錄器於三種配置方式之產量比較圖 .......................... 32
圖2.29、八台燒錄器的三種配置方式差異 .......................................... 32
圖2.30、燒錄器配置數量一至四台的位置與設備最大移動距離 ...... 35
圖2.31、一至四台燒錄器於晶片燒錄時間10~120 秒所獲得的提升比
例圖............................................................................................. 37
圖3.1、行為的決策系統整體架構 ........................................................ 40
圖3.2、包容結構(Subsumption Architecture, SA) [20] ......................... 40
圖3.3、FSA 機制結構範例 .................................................................... 41
圖3.4、BDA 系統範例[30] .................................................................... 42
圖3.5、DAMN 系統架構[35] ................................................................ 44
圖3.6、基於最佳化演算法之模糊行為決策系統架構圖 .................... 45
圖3.7、基於最佳化演算法之模糊行為決策系統-設備無異常架構圖46
圖3.8、輸入1 xA 的歸屬函數 .................................................................... 51
圖3.9、輸入2 xA 的歸屬函數 .................................................................... 51
圖3.10、輸出yA 的歸屬函數 .................................................................. 51
圖3.11、對應動作的選擇流程圖 .......................................................... 53
圖3.12、三角形歸屬函數 ...................................................................... 55
圖3.13、最佳參數集所對應模糊系統之輸入歸屬函數轉換範例 ...... 57
圖3.14、基於最佳化演算法之模糊行為決策系統架構圖 .................. 69
圖3.15、監督模組範例示意圖 .............................................................. 71
圖3.16、無異常設備實驗產量比較圖 .................................................. 73
圖3.17、無異常狀態時，工作十盤晶片盤的燒錄器晶片數量模擬圖74
圖3.18、無異常狀態時，設備產量與個別燒錄器產量模擬圖 .......... 75
圖3.19、異常狀態時，晶片燒錄時間70 秒未使用監督模組的燒錄器
晶片數量模擬圖 ........................................................................ 75
圖3.20、異常狀態時，未使用監督模組的設備產量與個別燒錄器產
量圖............................................................................................. 76
圖3.21、異常狀態時，晶片燒錄時間70 秒使用監督模組的燒錄器晶片數量模擬圖 ............................................................................ 76
圖3.22、異常狀態時，使用監督模組的設備產量與個別燒錄器產量
圖 ................................................................................................. 77
圖3.23、使用監督模組之產量增加數據圖 .......................................... 78
圖4.1、取放系統皮帶輪位置標示 ........................................................ 85
圖4.2、雙臂SCARA 機器手臂DexTRA [50] ...................................... 86
附錄圖1、晶片燒錄時間10 秒，四種決策方式的晶片數量模擬圖 . 93
附錄圖2、晶片燒錄時間20 秒，四種決策方式的晶片數量模擬圖 . 94
附錄圖3、晶片燒錄時間30 秒，四種決策方式的晶片數量模擬圖 . 94
附錄圖4、晶片燒錄時間40 秒，四種決策方式的晶片數量模擬圖 . 95
附錄圖5、晶片燒錄時間50 秒，四種決策方式的晶片數量模擬圖 . 95
附錄圖6、晶片燒錄時間60 秒，四種決策方式的晶片數量模擬圖 . 96
附錄圖7、晶片燒錄時間70 秒，四種決策方式的晶片數量模擬圖 . 96
附錄圖8、晶片燒錄時間80 秒，四種決策方式的晶片數量模擬圖 . 97
附錄圖9、晶片燒錄時間90 秒，四種決策方式的晶片數量模擬圖 . 97
附錄圖10、晶片燒錄時間100 秒，四種決策方式的晶片數量模擬圖98
附錄圖11、晶片燒錄時間110 秒，四種決策方式的晶片數量模擬圖98
附錄圖12、晶片燒錄時間120 秒，四種決策方式的晶片數量模擬圖99
附錄圖13、GA 的適應值變化情況 ..................................................... 100
附錄圖14、PSO 演算法的適應值變化情況 ....................................... 102

表目錄
表 1.1、大型晶片自動燒錄設備 .............................................................. 4
表1.2、小型晶片自動燒錄設備 .............................................................. 5
表2.1、設備模擬器驗證實驗之參數設計表 ........................................ 21
表2.2、四台燒錄器及配置方式A 於晶片燒錄時間10~120 秒之產量
表 ................................................................................................. 23
表2.3、四台燒錄器及配置方式B 於晶片燒錄時間10~120 秒之產量
表 ................................................................................................. 24
表2.4、四台燒錄器及配置方式C 於晶片燒錄時間10~120 秒之產量
表 ................................................................................................. 25
表2.5、八台燒錄器及配置方式A 於晶片燒錄時間10~120 秒之產量
表 ................................................................................................. 28
表2.6、八台燒錄器及配置方式B 於晶片燒錄時間10~120 秒之產量
表 ................................................................................................. 29
表2.7、八台燒錄器及配置方式C 於晶片燒錄時間10~120 秒之產量
表 ................................................................................................. 30
表2.8、晶片燒錄時間與燒錄器配置數量計算參數 ............................ 35
表2.9、不同燒錄器數量之產量比較表 ................................................ 36
表2.10、一至四台燒錄器於晶片燒錄時間10~120 秒所獲得的產量與
產量差異 .................................................................................... 36
表2.11、一至四台燒錄器於晶片燒錄時間10~120 秒所獲得產量提升
比例............................................................................................. 37
表3.1、模糊行為決策系統的模糊規則庫 ............................................ 52
表3.2、模糊行為決策與原廠動作流程之產量比較表 ........................ 53
表3.3、GA 與PSO 演算法使用的參數列表 ........................................ 72
表3.4、無異常設備之四種決策方法實驗結果(單位：UPH) ............. 73
表3.5、異常狀態時，不同燒錄器燒錄70 秒的實驗數據表 .............. 77
表3.6、晶片燒錄時間10~120 秒，不同燒錄器發生異常的實驗數據
表 ................................................................................................. 78
表3.7、GA 與PSO 於不同燒錄時間獲得的搜尋結果 ........................ 80
表3.8、晶片燒錄時間50 秒，第三台燒錄器異常狀態時，不同br所
獲得產量的實驗結果及晶片數量模擬圖 ................................ 83

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