氧化鋅奈米元件會操作在不同環境條件，當元件操作於濕度
環境、氣體及化學溶劑環境會導致氧化鋅奈米線產生變質.本研
究將針對氧化鋅奈米線於濕度環境下的自發成長機制作探討。當
氧化鋅奈米結構置於相對濕度在80%±5%時，約18 小時的時間可
以觀察到氧化鋅奈米線本體成長出明顯的分枝結構。當相對濕度
於70%±5%區間，氧化鋅奈米線無法在18 小時內成長分枝結構，
但當時間拉長至20 天時，氧化鋅奈米線本體亦可成長出分枝結
構。若相對濕度超過85%，因為奈米線本體表面無法成核，即使
經過很長的時間亦無法成長出分枝結構。當水氣和氧化鋅奈米線
本體反應時會產生帶負電的水溶液，因此可以利用外加電場控制
其生長方向。藉由成長機制的探討，能將氧化鋅奈米線元件操作
於不同環境底下，且確保元件不會因為外部環境造成損壞.

Zinc oxide nanowires devices will be operated in different
environment conditions, the morphology of ZnO NWs will be variant due to the humidity, gas and chemical convictions. This study was focused on the spontaneous growth mechanism of ZnO NWs in different humidity.
Around RH80%±5%, the branch ZnO nanostructures were fabricated from the origin ZnO NWs within 18hr. Around RH70%±5%,the branch ZnO NWs did not growth until 20days.When the humidity over RH85%,the branch ZnO were not fabricated even if for long time that’s due to the origin ZnO NWs surface cannot nucleated. The branch ZnO NWs synthesized in room temperature and analyzed by OM、SEM and TEM.By using electric field, the growth direction of the brench ZnO NWs can be controlled. In this research work, the regrowth mechanism can be figured out and the ZnO-based NWs devices can be operated in different environment conditions without degenerating efficiency.

第一章 緒論.............................................1
1.1 前言...............................................1
1.2 簡介...............................................3
1.3 研究動機...........................................4
第二章 理論與文獻回顧.................................5
2.1 氧化鋅奈米線之合成................................5
2.1.1 化學氣相沉積法..............................5
2.1.2 水熱法......................................6
2.2 氧化鋅奈米線分支結構成長.........................7
2.3 極性水溶液對氧化鋅奈米線之影響....................8
2.4 自發性成長碳酸鋅奈米結構..........................8
2.5 材料的非線性現象..................................9
2.5.1 成核........................................9
2.5.2 生長........................................10
第三章 實驗步驟與研究方法...........................12
3.1 研究方法.........................................12
3.1.1 氧化鋅奈米線製備...........................12
3.1.2 實驗流程...................................13
3.1.3 實驗步驟...................................14
3.1.4 實驗環境變因設定...........................16
3.2 實驗儀器.........................................18
3.2.1 SEM(掃描式電子顯微鏡) .....................18
3.2.2 TEM(穿隧式電子顯微鏡) .....................18
3.2.3 Photoluminescence .........................19
第四章 實驗結果與討論................................20
4.1 濕度環境對氧化鋅奈米線自發成長影響...............20
4.2 濕度環境下電荷累積對自發成長的影響...............30
4.3 濕度環境下施加電場對自發成長的影響...............33
4.4 自發性成長氧化鋅奈米線光學性質...................46
4.5 SEM 分析.........................................51
4.6 TEM 分析.........................................55
第五章 總結論.........................................57
5.1 成長機制總結.....................................57
5.2 分析處理總結.....................................57
5.3 奈米元件不適當操作環境...........................58
第六章 未來工作.......................................59
6.1 未來工作.........................................59
參考文獻................................................61
圖 目 錄
圖1-1 氧化鋅奈米線表體比例圖.............................2
圖1-2 氧化鋅閃鋅礦結構...................................4
圖2-1 Lieber 團隊成長示意圖................................7
圖2-2 β相成核示意圖....................................9
圖2-3 系統內部溶質原子濃度分布...........................9
圖3-1 Vapor-Solid 成長機制示意圖..........................12
圖3-2 實驗流程圖........................................13
圖3-3 樣品示意圖.........................................15
圖3-4 實驗變因..........................................17
圖3-5 光致激發示意圖....................................19
圖4-1 相對濕度80%±5%奈米線成長組圖......................22
圖4-2 相對濕度70%±5%奈米線成長組圖......................23
圖4-3 相對濕度90%±5%奈米線成長組圖......................23
圖4-4 氧化鋅奈米線表面溶解現象...........................23
圖4-5 氧化鋅成長相圖.....................................27
圖4-6 濃度梯度關係圖.....................................28
圖4-7 自發性成長示意圖...................................28
圖4-8 電荷累積樣品圖示...................................30
圖4-9 電荷累積實驗組光學顯微鏡圖.........................31
圖4-10 電場施加示意圖 .................................33
圖4-11 多根氧化鋅奈米線在外加電場下自發成長光學顯微鏡圖..34
圖4-12 單根氧化鋅奈米線在外加電場下自發成長光學顯微鏡圖..35
圖4-13 多根氧化鋅奈米線外加電場自發成長SEM 圖............36
圖4-14 單根氧化鋅奈米線外加電場自發成長SEM 圖............37
圖4-15 電場方向示意圖....................................38
圖4-16 電場作用下自發性成長示意圖........................39
圖4-17 多根氧化鋅奈米線外加電場光學顯微鏡圖..............41
圖4-18 氧化鋅奈米線本體在電場作用下的表面形貌............43
圖4-19 氧化鋅奈米線電場密集處SEM 圖像....................44
圖4-20 氧化鋅奈米線本體底部成長圖........................45
圖4-21 PL 光譜照射區域...................................47
圖4-22 氧化鋅奈米線本體中心PL 光譜.......................47
圖4-23 氧化鋅奈米線本體與分支結構邊界PL 光譜.............48
圖4-24 氧化鋅奈米線分支結構PL 光譜.......................48
圖4-25 自發性成長氧化鋅奈米線光譜比較圖..................49
圖4-26 分支結構退火前後PL 光譜圖.........................50
圖4-27 擴散機制造成的三種生長情況存在....................52
圖4-28 自發性成長過程中的不同形貌........................53
圖4-29 SEM 元素分析.......................................54
圖4-30 TEM 圖像:本體與分支結構 與 HR 圖像................55
圖4-31 TEM 圖像..........................................56
表 目 錄
表4-1 溫度與飽和蒸汽壓關係圖..........................25

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