本文提出一種新穎戊二醛交聯明膠之微成型技術，並且利用所成型之明膠微圖案來吸引癌細胞的生長貼附，除了以加入感光增感劑曝照紫外光(ultra-violet)交聯明膠方式與用戊二醛選擇性交聯方式之外，進一步利用氧氣電漿(O2 plasma)蝕刻方式來製作明膠微圖案，本新穎之明膠微圖案成型方式可以確保明膠之交聯程度、避免以戊二醛選擇性交聯方式所產生的過度交聯(over-crosslink)、增加明膠微圖案與玻璃基材之間的黏著程度，線寬解析度最佳可到達2微米，而利用傳統光蝕刻微影技術(photolithography)可以成功的製作出戊二醛交聯明膠之微圖案，利用明膠材料之特性，成功的吸引癌細胞產生選擇性之貼附生長。
    控制細胞生長的位置對於生醫感測器的製作、組織工程、生醫電子以及基礎生物研究而言是相當重要的，而本文則提供一個用以控制細胞生長位置的材料，也進一步將此材料實際應用於生醫感測器，監控細胞生長貼附狀態。在細胞培養過程中，細胞的黏著生長(cell adhesion)及其蔓延(cell spreading)是黏著型細胞的基本生長過程，其生長過程關係著人體的防禦系統、組織的形成與訊息傳遞路徑。而在個體細胞層級中，細胞的黏著生長(cell adhesion)與蔓延(cell spreading)關聯著單一細胞的許多特性，而單一細胞形態的改變，傳統上則使用光學的方式來進行量測，然而生醫感測器則提供了另一種量測方式。長久以來，電子細胞基質阻抗判斷技術(Electric Cell-substrate Impedance Sensing, ECIS)已經被認定是有效的方法，利用ECIS技術可以監測黏著型細胞之形態、活力以及細胞周遭環境變化。
    本文結合了ECIS技術、明膠微圖案成型技術與光學方式來製作一新穎之細胞培養系統，此系統包含一個具有即時觀察光學模組之培養箱以及整合明膠微圖案之ECIS感測晶片，此光學模組可以用於即時觀察培養箱中不同活體細胞目標，除了可透過光學模組觀察活體細胞活動，進行影像監控之外，接近細胞大小之小尺明膠微圖案直接被成型於工作電極上方，藉此明膠微圖案使細胞產生選擇性黏著，利用明膠微圖案控制細胞生長於感測電極上方，進一步透過感測晶片輸出之阻抗訊號變化，監控細胞生長貼附之狀態，同時透過光學觀察模組之即時影像也可確認量訊號變化來自細胞之不同生長貼附狀態。

This work proposes a novel technique to fabricate micropatterns of glutaraldehyde (GA)-crosslinked gelatin and induce the attachment of tumor cells to the gelatin micropatterns. It provides another method to crosslink gelatin other than using the photo-sensitizing agents or selective GA-crosslinked technique. The gelatin micropatterns are fabricated by O2 plasma etching process. This novel technique can ensure the degree of crosslink, prevent the over-crosslink from pattern deformation and enhance the adhesion between the gelatin and glass slide. The best spatial resolution of the gelatin micropatterns can be reached to 2μm. The micropatterns of GA-crosslinked gelatin can still be made successfully by the conventional photolithography. By the properties of gelatin, tumor cells are successfully attracted to produce a selective.
    It is important to control living cells onto the given surface for biosensor fabricating, tissue engineering, bioelectronics and basic biology studies. This thesis herein proposes a material to control cell positioning on the surface. Moreover, the material is actually employed in biosensor to monitor morphology of living cells. During the cell culture process, cell adhesion and cell spreading are fundamental processes of adherent cells. Furthermore, cell adhesion and cell spreading are also crucial to signal transduction pathways of a cell, the formation of tissues and the body’s defense system. At the individual cell level, some properties of a living cell are associated with cell adhesion and cell spreading processes. Traditionally, the changes of individual cell morphology are measured using the optical methods. In addition to the optical methods used to monitor the cell morphology of living cells, biosensors provide another means to monitor the changes of cell morphology. ECIS methods have long been regarded as a valid approach to monitor the morphology, viability, and environmental change of the adherent cells.
    This thesis combines ECIS technique, fabrication of gelatin micropattern and optical methods to set up a new cell culture system. This system includes a culture incubator with a compact optical real-time monitoring module and an ECIS sensor chip with gelatin micro patterns. The optical observing module is used for observing different targets of living cells in the incubator. Furthermore, the optical module can be used to monitor the cell behavior. In the meantime, the gelatin micropatterns fabricated firmly on the ECIS working electrodes have a small size which is purposely comparable to cells. By the gelatin micropatterns, cells are attracted to produce a selective adhesion during the stages of falling and attachment of cell culture. By this way, living cells can be controlled onto the given working electrode surface. The morphology of living cell can be monitored by changes of impedance signal from ECIS chip. Meanwhile, the data attributed to various cell morphologies also can be confirmed by the real-time image of the optical module.

目錄
中文摘要...........................................................................I
英文摘要...........................................................................III
目錄...................................................................................V
圖目錄...............................................................................VIII
表目錄...............................................................................XV
第一章 緒論 ..................................................................1
1-1 微機電系統...............................................................1
1-2 動物細胞培養...........................................................5
1-3 研究動機...................................................................7
1-4 文獻回顧...................................................................9
1-5 研究目的...................................................................13
1-6 文章架構...................................................................15
第二章 明膠製程材料與明膠圖案製程.....................17
2-1 明膠製程材料簡介..................................................18
2-1-1 明膠材料(gelatin)..................................................18
2-1-2 重鉻酸鉀(K2Cr2O7).............................................21
2-1-3 戊二醛交聯劑(glutaraldehyde)............................22
2-2 明膠微圖案製程.....................................................22
2-2-1 感光明膠成型明膠微圖案.................................22
2-2-2 戊二醛選擇性交聯成型明膠微圖案................25
2-2-3 氧氣電漿蝕刻成型戊二醛交聯明膠微圖案...36
2-3 三種明膠微成型技術之比較................................46
2-4 與其他蛋白質或膠原微圖案成型技術之比較...47
第三章 明膠微圖案應用於細胞培養.........................49
3-1 細胞無菌培養操作技術建立................................49
3-1-1 無菌操作基本技術..............................................52
3-1-2 細胞培養液之調配..............................................52
3-1-3 細胞解凍與培養..................................................55
3-1-4 細胞計數(cell counting).......................................60
3-1-5 細胞繼代培養(subculture)...................................63
3-1-6 細胞冷凍保存......................................................65
3-2 交聯明膠薄膜表面接觸角量測...........................68
3-3 交聯明膠微圖案之培養液態環境安定性...........71
3-4 明膠微圖案之細胞選擇性生長...........................72
3-4-1 明膠微圖案之細胞培養測試............................72
3-4-2 不同明膠微圖案對細胞生長之影響................76
3-4-3 明膠微圖案誘導單一細胞之黏著生長............79
第四章 細胞培養影像監視模組之設計與製作.........82
4-1 具即時觀察拍攝之CO2培養箱..........................82
4-2 具即時觀察拍攝CCD模組之設計與製作.........83
4-3 具即時觀察拍攝CCD模組之特點及功效.........92
第五章 整合明膠微圖案之電阻抗感測晶片.............94
5-1 電阻抗式感測晶片之可行性評估與試作............94
5-2 電阻抗式感測晶片設計........................................98
5-3 電阻抗式感測晶片製作........................................100
5-3-1 氧化銦錫(ITO)感測電極之製作........................100
5-3-2 成型誘導細胞貼附之明膠微圖案.....................113
5-3-3 訊號連接電路與PDMS矽膠環之製作............116
第六章 電阻抗感測晶片之訊號量測.........................129
6-1 量測實驗設備架設說明........................................129
6-2 感測晶片工作特性量測........................................134
6-3 細胞貼附生長於感測晶片後之現地量測............137
第七章 結論與未來建議.............................................145
7-1 本文貢獻之彙整....................................................145
7-2 未來建議................................................................150
參考文獻.......................................................................153
論文著述目錄...............................................................162
附錄A...........................................................................164
附錄B...........................................................................165
圖目錄
圖1-1 以明膠為阻擋層作微壓印轉印蛋白質圖形 ............... 9
圖1-2 以PDMS微型印章轉印蛋白質製作細胞微圖案 ............. 9
圖1-3 以機器手臂做快速大量蛋白質點印刷 .................. 10
圖1-4 以金屬薄膜自我組裝操控細胞生長位置 .................................. 10
圖1-5 CMOS多電極陣列電路晶片 ....................................................... 11
圖1-6 封裝上PDMS高分子之CMOS多電極陣列晶片 ...................... 11
圖1-7 ECIS技術量測單一細胞貼附過程示意圖 .................................. 12
圖1-8 阻抗式感測電極上視圖 .............................................................. 13
圖1-9 ECIS技術量測架設示意 .............................................................. 13
圖1-10 論文架構之樹狀圖 .................................................................... 16
圖2-1 膠原蛋白分子鏈結構 ............................. 18
圖2-2 (a)明膠單體結構；(b)明膠結構鏈 ................. 19
圖2-3 明膠中所含氨基酸成份 ........................... 19
圖2-4 明膠分子鏈結構 ............................. 19
圖2-5 明膠溶液濃度與融點關係圖 ...................................................... 20
圖2-6 高分子光架橋反應 ...................................................................... 21
圖2-7 試藥級重鉻酸鉀粉末 .................................................................. 21
圖2-8 感光明膠製作明膠微圖案製作流程圖 ...................................... 23
圖2-9 感光明膠補強聚對二甲苯結構示意圖 ...................................... 24
圖2-10 感光明膠補強聚對二甲苯空腔微結構 .................................... 24
圖2-11購自SIGMA之試藥級明膠粉末 ................................................ 25
圖2-12 明膠粉末吸水膨潤後 ................................................................ 25
圖2-13 隔水加熱溶解明膠粉末 ............................................................ 26
圖2-14 戊二醛選擇性交聯成型明膠微圖案製作流程圖 .................... 28
圖2-15 光阻殘留於明膠微圖案上方 .................................................... 29
圖2-16 曝光後產生光阻脫層之試片（左下） ........................................ 29
圖2-17 表面無光阻殘留之明膠微圖案 ................................................ 30
圖2-18 產生皺紋之明膠結構表面輪廓掃描圖 .................................... 30
圖2-19 戊二醛與明膠交聯反應機制 .................................................... 33
圖2-20 交聯時間過長之交聯明膠微圖案 ............................................ 33
圖2-21 過度交聯明膠微圖案之表面輪廓.............................................. 34
圖2-22 不同戊二醛濃度在不同交聯時間所產生之過交聯距離 ........ 34
圖2-23 適當交聯時間控制無毛邊明膠微圖案 .................................... 36
圖2-24 氧氣電漿蝕刻戊二醛交聯明膠微圖案製程 ............................ 37
圖2-25 完成製作之明膠微圖案 ............................................................ 40
圖2-26 電子顯微鏡拍攝氧氣電漿蝕刻成型明膠微圖案 .................... 41
圖2-27 原子力顯微鏡掃描量測明膠微圖案厚度 ................................ 42
圖3-1 無菌操作台氣流示意圖 .............................................................. 50
圖3-2 本實驗室細胞培養機台：CO2培養箱、無菌操作台 ................... 51
圖3-3 桌上型滅菌釜 .............................................................................. 51
圖3-4 細胞培養用之25T-flask培養瓶.................................................... 58
圖3-5 水浴槽37℃回溫 .......................................................................... 58
圖3-6 無菌操作 ...................................................................................... 58
圖3-7 放置培養瓶於培養箱內 .............................................................. 59
圖3-8 以倒立式相位差顯微鏡觀察細胞貼附狀況 .............................. 59
圖3-9 長滿培養瓶底部之HeLa子宮頸癌細胞 .................................... 59
圖3-10 血球計數盤 ................................................................................ 62
圖3-11 手按計數器 ................................................................................ 62
圖3-12 拍打flask底部使細胞脫離......................................................... 62
圖3-13以微量滴管來進行調製細胞冷凍液 .......................................... 67
圖3-14將細胞液由flask移入50mL離心管中........................................ 67
圖3-15 以吸唧管調配冷凍液 ................................................................ 67
圖3-16 以食指尖輕拍離心管底部分散細胞 ........................................ 68
圖3-17 加入冷凍細胞液於1mL冷凍小管 ............................................ 68
圖3-18 表面接觸角量測儀 .................................................................... 70
圖3-19 材料表面接觸角量測 ................................................................ 70
圖3-20 明膠試片連續浸泡培養液之腫脹測試 .................................... 72
圖3-21 全明膠薄膜細胞培養測試片 .................................................... 73
圖3-22 全明膠薄膜細胞培養測試片...................................................... 74
圖3-23 明膠微圖案細胞生長選擇性測試 ............................................ 76
圖3-24 HepG2癌細胞貼附生長於明膠微圖案 ..................................... 78
圖3-25 HeLa癌細胞貼附生長於明膠微圖案 ........................................ 78
圖3-26 NS-1癌細胞貼附生長於明膠微圖案 ........................................ 79
圖3-27 SEM拍攝HeLa細胞生長於不同尺寸明膠微圖案 ................... 80
圖3-28 SEM拍攝HepG2細胞生長於蜂窩形明膠微圖案 .................... 81
圖4-1 具即時觀察拍攝之CO2培養箱架構 ........................................... 83
圖4-2 相容於培養箱之光學觀察子系統3D示意圖 ............................ 83
圖4-3 微分干涉差(DIC)光路示意圖 ..................................................... 85
圖4-4 簡易DIC光路架設與成像測試.................................................... 87
圖4-5 氣密罩及微分干涉差之光機結構設計示意圖 .......................... 87
圖4-6 氣密罩及光機結構組合圖............................................................ 88
圖4-7 光機結構與實際光路對照圖 ...................................................... 88
圖4-8 光機結構零件爆炸圖 .................................................................. 89
圖4-9 實際微分干涉差之光機結構 ...................................................... 89
圖4-10 光機結構與氣密罩組裝置入細胞培養箱實體圖 .................... 90
圖4-11 即時拍攝HepG2癌細胞於明膠微圖案上方之活動 ................ 91
圖5-1 製作完成之感測電極 .................................................................. 95
圖5-2 無細胞系統下之循環伏安量測 .................................................. 97
圖5-3 活體細胞培養之循環伏安量測 .................................................. 97
圖5-4 ITO電阻抗感測電極尺寸設計示意圖 ........................................ 99
圖5-5 結合PDMS矽膠環之感測晶片示意圖 ...................................... 99
圖5-6 ITO感測電極製程流程圖 .......................................................... 101
圖5-7 完成黃金對準記號製作之ITO玻璃 ......................................... 102
圖5-8 金屬舉離法程序示意圖 ............................................................ 104
圖5-9 試作之梳狀ITO電極 ................................................................. 105
圖5-10 相位差顯微鏡觀察光線穿透ITO效果 ................................... 105
圖5-11 不同時間之ITO蝕刻深度 ....................................................... 105
圖5-12 完成蝕刻之ITO玻璃 ............................................................... 106
圖5-13 完成製作之ITO電阻抗感測電極 ........................................... 106
圖5-14 聚對二甲苯N、C、D材料與化學結構 ..................................... 107
圖5-15 聚對二甲苯沉積過程 .............................................................. 108
圖5-16 聚對二甲苯鍍膜機(PDS2010) ................................................. 109
圖5-17 晶片與晶舟置入聚對二甲苯鍍膜機台中 .............................. 109
圖5-18 反應離子蝕刻機 ...................................................................... 110
圖5-19 完成光阻阻擋層製作之感測電極 .......................................... 111
圖5-20 完成光阻阻擋層製作之金屬接點 .......................................... 111
圖5-21 完成parylene蝕刻之感測電極 ............................................... 111
圖5-22 完成parylene蝕刻之金屬接點 ............................................... 112
圖5-23 金屬接點處之parylene膜厚 .................................................... 112
圖5-24 金屬接點處之ITO電極膜厚 ................................................... 112
圖5-25 ITO電極上方黃金接點膜厚 .................................................... 113
圖5-26 誘導細胞貼附之明膠微圖案製作流程 .................................. 115
圖5-27 完成明膠微圖案製作之感測電極 .......................................... 115
圖5-28 相位差顯微鏡拍攝之感測晶片 .............................................. 116
圖5-29 PDMS矽膠環夾治具設計圖 .................................................... 117
圖5-30 完成加工之PDMS灌注夾治具 .............................................. 118
圖5-31 感測晶片放置於夾治具下圓盤 .............................................. 120
圖5-32 夾治具灌注內壁塗抹PDMS脫模劑 ...................................... 120
圖5-33 電阻抗感測晶片與夾治具組合圖 .......................................... 120
圖5-34 灌注PDMS矽膠於晶片上方 .................................................. 121
圖5-35 真空烤箱烘烤固化PDMS矽膠 .............................................. 121
圖5-36 烘烤後之PDMS矽膠環與感測晶片 ...................................... 121
圖5-37 旋轉拆除夾治具上圓盤 .......................................................... 122
圖5-38 拆除夾治具上圓盤後之感測晶片 .......................................... 122
圖5-39 將PDMS矽膠環由中央金屬環頂出 ...................................... 122
圖5-40 完成PDMS矽膠環製作之電阻抗感測晶片 .......................... 123
圖5-41 PCB電路佈線光罩 ................................................................... 123
圖5-42 PCB訊號連接器 ....................................................................... 124
圖5-43 曝光機進行PCB曝光 .............................................................. 125
圖5-44 PCB顯影定義設計線路 ........................................................... 125
圖5-45 氣泡蝕刻槽 .............................................................................. 126
圖5-46 完成蝕刻之電路板 .................................................................. 126
圖5-47 完成剪裁與開孔加工之電路板 .............................................. 127
圖5-48 電路板與感測晶片結合 .......................................................... 127
圖5-49 完成打線之感測晶片 .............................................................. 128
圖5-50 完成封膠之電路板與感測晶片 .............................................. 128
圖6-1 量測實驗架設示意圖 ................................................................ 130
圖6-2 感測晶片與電路板連接至訊號線 ............................................ 130
圖6-3 自製量測訊號線 ........................................................................ 131
圖6-4 感測晶片放置於光學模組下方 ................................................ 131
圖6-5 充填氯化鈉水溶液之液面 ........................................................ 132
圖6-6 充填含有血清培養液之液面 .................................................... 132
圖6-7 光學模組即時拍攝感測電極 .................................................... 133
圖6-8 平移台之控制盒與平移台控制手把 ........................................ 133
圖6-9 即時拍攝感測晶片上方細胞之畫面 ........................................ 134
圖6-10 產生訊號干擾之掃描結果 ...................................................... 135
圖6-11 培養箱接地後之掃描結果 ...................................................... 136
圖6-12感測電極編號示意圖 ................................................................ 137
圖6-13 工作電極無細胞系統量測 ...................................................... 137
圖6-14 接種八小時之單一細胞貼附於不同工作電極 ...................... 139
圖6-15 電極CH2之單一細胞量測(接種8小時) ................................ 139
圖6-16 電極CH3之單一細胞量測(接種8小時) ............................... 139
圖6-17 電極CH4之單一細胞量測(接種8小時) ............................... 140
圖6-18 HeLa cell接種後24小時(左)與48小時(右) ............................. 141
圖6-19 單一細胞在不同接種時間貼附情形之量測結果比較 .......... 141
圖6-20 貼附面積與阻抗變化量關係圖(細胞接種8小時) .................. 142
圖6-21 兩隻細胞貼附於電極CH10上方(細胞接種8小時) ............... 143
圖6-22 三隻細胞貼附於電極CH12上方(細胞接種8小時) ............... 143
圖6-23 電極CH10之雙細胞量測(細胞接種8小時) ........................... 144
圖6-24 電極CH12之三細胞量測(細胞接種8小時) ........................... 144
圖7-1 無光學補償鏡片所造成之紋路 ................................................ 151
圖7-2 充填不同液體之表面曲面 ........................................................ 152
圖A-1 明膠薄膜厚度、濃度與塗佈轉速之關係 ................................. 164
圖B-1 Z軸電動線性平移台 .................................................................. 165
圖B-2 XY軸電動線性平移台 .............................................................. 166
表目錄
表2-1 明膠薄膜蝕刻率 .............................................. 42
表2-2 光阻薄膜(AZP-4620)蝕刻率 ....................................................... 43
表3-1 不同材料試片之表面接觸角量測 .............................................. 71
表3-2 試片經細胞培養72小時後細胞密度 ......................................... 76
表5-1 實際量測阻值(串聯1 MΩ的限流電阻) ...................................... 97
表5-2 ITO玻璃詳細規格表 .................................................................. 102
表6-1 貼附面積A與阻抗變化量ΔR比較(細胞接種8小時) ............. 142
表6-2 貼附面積A與阻抗變化量ΔR比較(細胞接種8小時) ............. 144
表A-1 明膠薄膜厚度、濃度與塗佈轉速間之關係值 ......................... 164

[1]	楊龍杰，『認識微機電』，台中，滄海書局，2001年。
[2]	R. Feynman, “There is Plenty of Room at the Bottom,” Journal of Micro-electromechanical Systems, Vol. 1, No.1, pp.60-66, 1992.
[3]	張志誠，『微機電技術』，台北，商周出版社， 2002年。
[4]	楊嘉麗，“新興科技介紹-微機電技術”，資策會資訊市場情報中心產業研究報告，頁1-16，2003 年。
[5]	李世光與孫美芳，“初探我國發展微機電系統與奈米技術新興科技的才培育與發展策略”，科技發展政策報導，頁845-858，2002 年。
[6]	張玉瓏、徐乃芝，『。生物技術（三版）』，台北，新文京出版，2008。
[7]	陳健尉，“生物晶片：技術發展及在生命科學上之應用”，後基因體時代之生物技術，第十五章，頁215-231，2004。
[8]	張雅芳、黃正仲，“微陣列生物科技”， 科學發展，381期，頁34-41，2004年。
[9]	黃國華，“基因晶片與生物醫學”， 科學發展，381期，頁64-69，2004年。
[10]	王少君，“第二代生物晶片-微流體晶片與蛋白質晶片”，科學發展，369期，頁74-77，2003年。
[11]	J. Kononen, L. Bubendorf, A. Kallionimeni, M. Bärlund, P. Schraml, S. Leighton, J. Torhorst, M. J. Mihatsch, G. Sauter and O. P. Kallionimeni, “Tissue microarrays for high-throughput molecular profiling of tumor specimens,” Nature Medicine, Vol. 4, Issue 7, pp. 844-847, 1998.
[12]	李國賓，“下一波生物晶片-微流體生醫晶片”，科學發展，385期，頁72-77，2005年。
[13]	J. Ziauddin and D. M. Sabatini, “Microarrays of cells expressing defined cDNAs,” Nature, Vol. 411, Issue 6833, pp. 107-110, 2001.
[14]	李慧瑜，“只要一滴血-談生物科技產業”，產經資訊，No.16，頁38-43，2004 年。
[15]	R. G. Harrison, “Observations on the living developing nerve fiber”Proc. Soc. Exp. Biol. Med., Vol. 4, pp. 140-143, 1907.
[16]	A. Carrel, “On the permanent life of tissue outside the organism,” Journal of Experimental Medicine, Vol. 15, pp. 516-528, 1912.
[17]	K. K. Sanford, W. R. Earle and G. D. Likely, “The growth in vitro of single isolated tissue cells,” J. Natl. Cancer Inst., Vol. 9, Issue 3, pp. 229-246, 1948.
[18]	G. O. Gey, W. D. Coffman and M. T. Kubicek, “Tissue culture studies of the proliferative capacity of cervical carcinoma and normal epithelium,” Cancer Res., Vol. 12. pp. 264-265, 1952.
[19]	H. Eagle, “The specific amino acid requirements of mammalian cells (strain L) in tissue culture,” J. Biol. Chem., Vol. 214, pp. 839-852.
[20]	R. C. Park, Methods of tissue culture, Paul B. Hoeber, New York, pp. 47, 1961.
[21]	R. G. Ham, “An improved nutrient solution for diploid Chinese hamster and human cell lines,” Experimental Cell Research, Vol. 29, Issue 3, pp. 515-526, 1963.
[22]	A. Mohr, W. Finger, K. J. Foehr, W. Goepel, H. Haemmerle and W. Nisch, “Performance of a thin film microelectrode array for monitoring electrogenic cells in vitro ,” Sensors and Actuators B: Chemical, Vol. 34, Issue 1-3, pp. 265-269, 1996
[23]	E. W. H. Jager, O. Inganaes and I. Lundstroem, “Microrobots for Micrometer-Size Objects in Aqueous Media: Potential Tools for Single-Cell Manipulation,” Science, Vol. 288, no. 5475, pp. 2235-2338, 2000.
[24]	S. M. Tosh and A. G. Marangoni, “Determination of the maximum gelation temperature in gelatin gels,” Applied Physics Letter, Vol. 84, Issue 21, pp. 4242-4244, 2004.
[25]	C. S. Chen, M. Mrksich, S. Huang, G. M. Whitesides and D. E. Ingber, “Geometric control of cell life and death,” Science, Vol. 276, Issue 5317, pp. 1425-1428, 1997.
[26]	X. Z. Shu, Y. Liu, F. Palumbo and G. D. Prestwich, “Disulfide-crosslinked hyaluronan-gelatin hydrogel films: A covalent mimic of the extracellular matrix for in vitro cell growth,” Biomaterials, Vol. 24, Issue 21, pp. 3825-3834, 2003.
[27]	H. Liu and Y. Ito, “Cell attachment and detachment on micropattern-immobilized poly(N-isopropylacrylamide) with gelatin ,” Lab on a Chip, Vol.2, Issue 3, pp. 175-178, 2002.
[28]	P. M. Neumann, B. Zur and Y. Ehrenreich, “ Gelatin-based sprayable foam as a skin substitute,“ J. Biomed. Mater. Res., Vol. 15, Issue 1, pp. 9-18, 1981.
[29]	J. K. Petersen, J. Krogsgaard, K. M. Nielsen and E.B. Norgaard, “ A comparison between 2 absorbable hemostatic agents: gelatin sponge (Spongostan®) and oxidized regenerated cellulose (Surgicel®),“ Int. J. Oral Surg., Vol. 13, Issue 5, pp. 406-410, 1984.
[30]	H. Takahashi, T. Miyoshi and K. Boki, “Study on hydrophilic properties of gelatin as a clinical wound dressing. II. Water-absorbing property and hemostatic effect of gelatin,” Tokushima J. Exp. Med., Vol. 40, Issue 3-4, pp.169-175, 1983.
[31]	C. H. Yao, J. S. Sun, F. H. Lin, C. J. Liao and C. W. Huang, “Biological effects and cytotoxicity of tricalcium phosphate and formaldehyde cross-linked gelatin composite,” Mater. Chem. Phys., Vol. 45, Issue 1, pp. 6-4, 1996.
[32]	S Fakirov, Z Sarac, T Anbar, B Boz, I Bahar, M Evstatiev, A. A. Apostolov, J. E. Mark and A. Kloczkowski, “Mechanical properties and transition temperatures of cross-linked oriented gelatin: 1. Static and dynamic mechanical properties of cross-linked gelatin,” Colloid Polym. Sci., Vol. 274, Issue 4, pp. 334-341.
[33]	W. F. Lee and S. C. Lee, “Effect of gelatin on the drug release behaviors for the organic hybrid gels based on N -isopropylacrylamide and gelatin,” Journal of Materials Science: Materials in Medicine, Vol. 18, Issue 6, pp. 1089-1096, 2007.
[34]	S. Matsuda, H. Iwata, N. Se and Y. Ikada, “Bioadhesion of gelatin films crosslinked with glutaraldehyde,“ Journal of Biomedical Materials Research, Vol. 45, Issue 1, pp.20-27, 1999.
[35]	M. S. Godbole, A. Seyda, J. Kohn and T. L. Arinzeh, “Surface properties of the substratum affect human mesenchymal stem cell differentiation,” Proc. IEEE 30th Annual Bioengineering Conference, Bioengineering, pp. 116-117, Northeast, USA, 2004.
[36]	R. Fernandes, H. Yi, L. Q. Wu, G. W. Rubloff, R. Ghodssi, W. E. Bentley and G. F. Payne, “Thermo-biolithography: A technique for patterning nucleic acids and proteins,” Langmuir, Vol. 20, Issue 3, pp. 906-913, 2004.
[37]	M. N. De Silva, R. Desai and D. J. Odde, “Micro-patterning of animal cells on PDMS substrates in the presence of serum without use of adhesion inhibitors,” Biomedical Microdevices, Vol. 6, Issue 3, pp. 219-222, 2004.
[38]	A. Revzin, P. Rajagopalan, A. W. Tilles, F. Berthiaume, M. L. Yarmush and M. Toner, “Designing a hepatocellular microenvironment with protein microarraying and poly(ethyleneglycol) photolithography,” Langmuir, Vol. 20, Issue 8, pp. 2999-3005, 2004.
[39]	M. Veiseh, B. T. Wickes, D. G. Castner and M. Zhang, “Guided cell patterning on gold-silicon dioxide substrates by surface molecular engineering,” Biomaterials, Vol. 25, Issue 16, pp. 3315-3324, 2004.
[40]	S. Hafizovic, F. Heer, W. Franks, F. Greve, A. Blau, C. Ziegler and A. Hierlemann, “CMOS bidirectional electrode array for electrogenic cells,” Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2006, Vol. 2006, Art. No. 1627722, pp. 4-7, 2006.
[41]	P. Seriburi, S. McGuire, A. Shastry, K. F. Böhringer and D. R. Meldrum, “Measurement of the cell-substrate separation and the projected area of an individual adherent cell using electric cell-substrate impedance sensing,” Anal. Chem., Vol. 80, Issue 10, pp. 3677-3683, 2008.
[42]	Y. Qiu, R. Liao and X. Zhang, “Real-time monitoring primary cardiomyocyte adhesion based on electrochemical impedance spectroscopy and electrical cell-substrate impedance sensing,” Analytical Chemistry, Vol. 80, Issue 4, pp. 990-996, 2008.
[43]	S. J. Fleire, J. P. Goldman, Y. R. Carrasco, M. Weber, D. Bray and F. D Batista, “B cell ligand discrimination through a spreading and contraction response,” Science, Vol. 312, Issue 5774, pp. 738–741, 2006.
[44]	B. Geiger, A. Bershadsky, R. Pankov and K. M. Yamada, “Transmembrane extracellular matrix-cytoskeleton crosstalk,” Nat. Rev. Mol. Cell Biol., Vol. 2, Issue 11, pp.793-805, 2001.
[45]	Y. F. Missirlis and A. D. Spiliotis, “Assessment of techniques used in calculating cell-material interactions,” Biomolecular Engineering, Vol. 19, Issue 2-6, pp. 287-294, 2002.
[46]	K. J. Van Vliet, G. Bao and S. Suresh, “The biomechanics toolbox: Experimental approaches for living cells and biomolecules ,” Acta Materialia, Vol. 51, Issue 19, pp. 5881-5905, 2003.
[47]	G. C. Easty, D. M. Easty and E. J. Ambrose, “Studies of cellular adhesiveness,” Experimental Cell Research, Vol. 19, Issue 3, pp. 539-548, 1960.
[48]	M. J. Levesque, R. M. Nerem and E. A. Spraque, “Vascular endothelial cell proliferation in culture and the influence of flow,” Biomaterials, Vol. 11, Issue 9, pp. 702-707, 1990.
[49]	A. J. Banes, J. Gilbert, D. Taylor and O. Monbureau, “A new vacuum-operated stress-providing instrument that applies static or variable duration cyclic tension or compression to cells in vitro,” Journal of Cell Science, Vol. 75, pp. 35-42, 1985.
[50]	C. M. Lo, H. B. Wang, M. Dembo and Y. L. Wang, “Cell movement is guided by the rigidity of the substrate,” Biophysical Journal, Vol. 79, Issue 1, pp. 144-152, 2000.
[51]	A. K. Harris, P. Wild and D. Stopak, “Silicone rubber substrata: A new wrinkle in the study of cell locomotion,” Science, Vol. 208, Issue 4440, pp. 177-179, 1980.
[52]	S. Munevar, Y. L. Wang and M. Dembo, “Traction force microscopy of migrating normal and H-ras transformed 3T3 fibroblasts,” Biophysical Journal, Vol. 80, Issue 4, pp. 1744-1757, 2001.
[53]	Y. Tseng, T. P. Kole and D. Wirtz, “Micromechanical mapping of live cells by multiple-particle-tracking microrheology,” Biophysical Journal, Vol. 83, Issue 6, pp.3162-3176, 2002.
[54]	A. R. Bausch, F. Ziemann, A. A. Boulbitch, K. Jacobson and E. Sackmann, “Local measurements of viscoelastic parameters of adherent cell surfaces by magnetic bead microrheometry,” Biophysical Journal, Vol. 75, Issue 4, pp. 2038-2049, 1998.
[55]	J. L. Tan, J. Tien, D. M. Pirone, D. S. Gray, K. Bhadriraju and C. S. Chen, “Cells lying on a bed of microneedles: An approach to isolate mechanical force,” Proceedings of the National Academy of Sciences of the United States of America, Vol. 100, Issue 4, pp. 1484-148918, 2003.
[56]	E. Evans, D. Berk and A. Leung, “Detachment of agglutinin-bonded red blood cells. I. Forces to rupture molecular-point attachments,” Biophysical Journal, Vol. 59, Issue 4, pp. 838-848, 1991.
[57]	J. Dai and M. P. Sheetz, “Mechanical properties of neuronal growth cone membranes studied by tether formation with laser optical tweezers,” Biophysical Journal, Vol. 68, Issue 3, pp. 988-996 1995.
[58]	J. Guck, R. Ananthakrishnan, C. C. Cunningham and J. Kas, “Stretching biological cells with light,” Journal of Physics Condensed Matte, Vol. 14, Issue 19, pp. 4843-4856, 2002.
[59]	C. Haber and D. Wirtz, “Magnetic tweezers for DNA micromanipulation,” Review of Scientific Instruments, Vol. 71, Issue 12, pp. 4561-4570, 2000.
[60]	R. Merkel, P. Nassoy, A Leung, K. Ritchie and E. Evana, “Energy landscapes of receptor-ligand bonds explored with dynamic force spectroscopy,” Nature, Vol. 397, Issue 6714, pp. 50-53, 1999.
[61]	N. O. Petersen, W. B. McConnaughey and E. L. Elson, “Dependence of locally measured cellular deformability on position on the cell, temperature, and cytochalasin B,” Proceedings of the National Academy of Sciences of the United States of America, Vol. 79, Issue 17 I, pp. 5327-5331,1982.
[62]	S. G. Shroff, D. R. Saner and R. Lal, “Dynamic micromechanical properties of cultured rat atrial myocytes measured by atomic force microscopy,” American Journal of Physiology - Cell Physiology, Vol. 269, Issue 1 38-1, pp. C286-C292, 1995.
[63]	C. A. Helm, W. Knoll and J. N. Israelachvili, “Measurement of ligand-receptor interactions,” Proceedings of the National Academy of Sciences of the United States of America, Vol. 88, Issue 18, pp. 8169-8173,1991.
[64]	S. R. Heidemann, S. Kaech, R. E. Buxbaum and A. Matus, “Direct observations of the mechanical behaviors of the cytoskeleton in living fibroblasts,” Journal of Cell Biology, Vol. 145, Issue 1, pp. 109-122, 1999.
[65]	A. Yamamoto, S. Mishima, N. Maruyama and M. Sumita, “A new technique for direct measurement of the shear force necessary to detach a cell from a material,” Biomaterials, Vol. 19, Issue 7-9, pp. 871-879, 1998.
[66]	O. Thoumine, A. Ott, O. Cardoso and J. J. Meister, “Microplates: A new tool for manipulation and mechanical perturbation of individual cells,” Journal of Biochemical and Biophysical Methods, Vol. 39, Issue 1-2, pp. 47-62 1999.
[67]	H. Miyazaki, Y. Hasekawa and K. Hayashi, “A newly designed tensile tester for cells and its application to fibroblasts,” Journal of Biomechanics, Vol. 33, Issue 1, pp. 97-104, 2000.
[68]	Ning Wang, James P. Butler and Donald E. Ingber, “Mechanotransduction across the cell surface and through the cytoskeleton,” Science, New Series, Vol. 260, No. 5111, pp. 1124-1127, 1993.
[69]	D. C. Van Essen, “A tension-based theory of morphogenesis and compact wiring in the central nervous system,” Nature, Vol. 385, Issue 6614, pp. 313-318, 1997.
[70]	K. D. Chen, Y. S. Li, M. Kim, S. Li, S. Yuan, S. Chien, J. Y. J. Shyy, “Mechanotransduction in response to shear stress. Roles of receptor tyrosine kinases, integrins, and Shc,” Journal of Biological Chemistry, Vol. 274, Issue 26, pp. 18393-18400, 1999.
[71]	N. Q. Balaan et al., “Force and focal adhesion assembly: A close relationship studied using elastic micropatterned substrates,” Nature Cell Biology, Vol. 3, Issue 5, pp. 466-472, 2001.
[72]	G. T. Charras, M. A. Horton, “Single cell mechanotransduction and its modulation analyzed by atomic force microscope indentation ,” Biophysical Journal, Vol. 82, Issue 6, pp. 2970-2981, 2002.
[73]	D. J. Webb, J. T. Parsons, A. F. Horwitz, “Adhesion assembly, disassembly and turnover in migrating cells-Over and over and over again ,” Nature Cell Biology, Vol. 4, Issue 4, pp. E97-E100, 2002.  
[74]	J. D. Humphrey, “Continuum biomechanics of soft biological tissues,” Proceedings of the Royal Society-Mathematical, Physical and Engineering Sciences (Series A), Vol. 459, Issue 2029, pp. 3-46, 2003. 
[75]	D. E Ingber, “Tensegrity I. cell structure and hierarchical systems biology,” Journal of Cell Science, Vol. 116, Issue 7, pp. 1157-11731, 2003.
[76]	G. Bao, S. Suresh, “Cell and molecular mechanics of biological materials,” Nature Materials, Vol. 2, Issue 11, pp. 715-725, 2003.
[77]	D. J. Tschumperlin et al., “Mechanotransduction through growth-factor shedding into the extracellular space,” Nature, Vol. 429, Issue 6987, pp. 83-86, 2004.
[78]	T. M. Suchyna, S. E. Tape, R. E. Koeppe, O. S. Andersen, F. Sachs, P. A. Gottlieb, “Bilayer-dependent inhibition of mechanosensitive channels by neuroactive peptide enantiomers,” Nature, Vol. 430, Issue 6996, pp. 235-240, 2004.
[79]	Lung-Jieh Yang and Yu-Cheng Ou, “The micro patterning of glutaraldehyde (GA)-crosslinked gelatin and its application to cell-culture,” Lab on a Chip, Vol. 5, Issue 9, pp. 979-984, 2005.
[80]	Y. C. Ou, C. W. Hsu, L. J. Yang, H. C. Han, Y. W. Liu, C. Y. Chen, “The attachment of tumor cells to the micropatterns of glutaraldehyde (GA)-crosslinked gelatin,” Proc. of APCOT’08 conference, Tainan, Taiwan, June 22-25, paper ID: 0236, 2008.
[81]	Y. C. Ou, C. W. Hsu, L. J. Yang, H. C. Han, Y. W. Liu, C. Y. Chen, “Attachment of tumor cells to the micropatterns of glutaraldehyde (GA)-crosslinked gelatin,” Sensors and Materials, Vol. 20, No. 8, pp. 435-446, 2008.
[82]	L. J. Yang, W. Z. Lin, T. J. Yao and Y. C. Tai, “Photo-patternable gelatin as protection layers in surface micromachinings,” Proc. of the 15th IEEE MEMS conference, Las Vegas, USA, Jan. 20-24, pp. 471-474, 2002.
[83]	L. J. Yang, W. Z. Lin, T. J. Yao and Y. C. Tai, “Photo-patternable gelatin as protection layers in low-temperature surface micromachinings,” Sensors and Actuators A: Physical, Vol. 103, Issue 1-2, pp. 284-290, 2003.
[84]	A. G. Ward and A. Courts Ed., “The science and technology of gelatin,” Acadimic Press, pp. 297-323, 1978.
[85]	J Jim Burroughs, “Gelatin solutions,” The manufacturing confectioner, pp 35-38, October 1996.
[86]	http://www.gelatin.com/
[87]	江晃榮，“生體高分子在食品工業上的運用”，食品資訊，頁19-25，1998。
[88]	J. E. Jolley, “The microstructure of photographic gelatin binders,” Photographic science and engineering, Vol.14, No.3, pp. 169-177, 1970.
[89]	J. B. Park, R. S. Lakes, “Structure-property relationships of biological materials,” Biomaterials Science and Engineering, Vol. 3, pp. 236-242, 1984.
[90]	D. W. Jopling, “The swelling of gelatin film. The effects of drying temperature and of conditioning the layers in atmospheres of high relative humidity,” Journal of Applied Chemistry, Vol. 6, pp.79-84, 1956.
[91]	連成東，“明膠的特性與銀鹽膠片的保存條件”，檔案學通訊，頁46-48， 1999.
[92]	Website: www.gelita.com/DGF-english
[93]	查良駿，“重鉻酸銨明膠膜的製備”，碩士論文，元智工學院化學工程研究所，指導教授王紀博士，85年6月。
[94]	J. Oksar, Light sensitive system, A John Wiley and Sons, New York, chapter 2, pp. 74, 1965.
[95]	H. K. Lu, F. P. Lin, W. F. Wu, “In vitro tests of porcine dermal collagen membranes biocompatibility and enzymatic degradation rate”, Chin Dent J, Vol. 17, No. 1, pp. 15-22, 1998.
[96]	林峰坯，“豬皮膠原蛋白膜之生物毒性與脢分解速率之研究”，碩士論文，台北醫學大學牙醫學系，指導教授呂炫堃博士，民國87年6月。
[97]	H. W. Sung, C. S. Hsu, H. L. Hsu and C. C. Shih, “Modification of collagen material with cross-linking reagents”, Chemistry, Vol. 52, No. 2, pp. 219-227, 1998.
[98]	L. J. Yang and W. C. Lin, “The patterning of glutaraldehyde-crosslinked gelatin,” Proc. IEEE MEMS, pp. 173-176, 2004.
[99]	P. M. Neumann, B. Zur and Y. Ehrenreich, “Gelatin-based sprayable foam as a skin substitute,” Journal of Biomedical Materials Research, Vol. 15, Issue 1, pp. 9-18, 1981.
[100]	Y. S. Choi, S. R. Hong, Y. M. Lee, K. M. Song, M. H. Park and Y. S. Nam, “Studies on gelatin-containing artificial skin: II. preparation and characterization of cross-linked gelatin-hyaluronate sponge,” Journal of Biomedical Materials Research, Vol. 48, Issue 5, pp. 631-639, 1999.
[101]	W. H. Chang, Y. Chang, P. H. Lai and H. W. Sung, “A genipin-crosslinked gelatin membrane as wound-dressing material: in vitro and in vivo studies,” Journal of Biomaterials Science- Polymer Edition, Vol. 14, Issue 5, pp. 481-495, 2003.
[102]	R. Lan Freshney, CULTURE OF ANIMAL CELLS, New York, A John Wiley and Sons, chapter 5, pp. 57, 2000.
[103]	J. B. Christen and A. G. Andreou, “Design, fabrication, and testing of a hybrid CMOS/PDMS microsystem for cell culture and incubation,” IEEE Transactions on Biomedical Circuits and Systems, Vol. 1, Issue 1, pp. 3-18, 2007.
[104]	L. Marcotte and M. Tabrizian, “Sensing surfaces: challenges in studying the cell adhesion process and the cell adhesion forces on biomaterials,” ITBM-RBM, Vol. 29, Issue 2-3, pp. 77-88, 2008.
[105]	I. Giaever and C. R. Keese, “Monitoring fibroblast behavior in tissue culture with an applied electric field,” Proc. Natl. Acad. Sci. U.S.A., Vol. 81, Issue 12, pp. 3761-3764, 1984.
[106]	I. Giaever and C. R. Keese, “A morphological biosensor for mammalian cells,” Nature, Vol. 366, Issue 6455, pp. 591-592, 1993.
[107]	C. D. Xiao, B. Lachance, G. Sunahara and J. H. T, Luong, “Assessment of cytotoxicity using electric cell–substrate impedance sensing: concentration and time response function approach,” Anal. Chem., Vol. 72, Issue 22, pp. 5748-5735, 2002.
[108]	J. H. T. Luong, M. Habibi-Rezaei, J. Meghrous, C. Xiao, K. B. Male and A. Kamen, “Monitoring motility, spreading, and mortality of adherent insect cells using an impedance sensor,” Anal. Chem., Vol. 73, Issue 8, pp. 1844-1848, 2001.
[109]	C. Xiao, B. Lachance, G. Sunahara and J. H. T. Luong, “An in-depth analysis of electric cell-substrate impedance sensing to study the attachment and spreading of mammalian cells.” Anal. Chem., Vol. 74, Issue 6, pp. 1333-1339, 2002.
[110]	M. Kowolenko, C. R. Keese, D. A. Lawrence and I. Giaever, “Measurement of macrophage adherence and spreading with weak electric fields,” J. Immunol. Methods, Vol. 127, Issue 1, pp. 71-77, 1990.
[111]	P. Mitra, C. R. Keese and I.Giaever, “Electric measurements can be used to monitor the attachment and spreading of cells in tissue culture,” Biotechniques, Vol. 11, Issue 4, pp. 504-510, 1991.
[112]	C. Tiruppathi, A. B. Malik, P. J. Del Vecchio, C. R. Keese and I. Giaever, “Electrical method for detection of endothelial cell shape change in real time: assessment of endothelial barrier function,” Proc. Natl. Acad. Sci. U.S.A., Vol. 89, Issue 17, pp. 7919-7923, 1992.
[113]	A. Sapper, J. Wegener and A. Janshoff, “Cell motility probed by noise analysis of thickness shear mode resonators,” Anal. Chem., Vol. 78, Issue 14, pp. 5184-5191, 2006.
[114]	P. Wolf, A. Rothermel, A. G. Beck-Sickinger and A. A. Robitzki, “Microelectrode chip based real time monitoring of vital MCF-7 mamma carcinoma cells by impedance spectroscopy,” Biosensors and Bioelectronics, Vol. 24, Issue 2, pp. 253-259, 2008.
[115]	薛凱鴻，“阻抗式生物感測器應用於人類白蛋白檢測之研究”，碩士論文，電機工程研究，指導教授蔡章仁，97年7月。
[116]	S. Rajaraman, M. A. McClain, S. O. Choi, J. D. Ross, S. P. DeWeerth, M. C. LaPlaca and M. G. Allen, “Three-dimensional metal transfer micromolded microelectrode arrays (MEAs) for in-vitro brain slice recordings,” Transducers and Eurosensors’07 , Article number 4300364, pp. 1251-1254, 2007.
[117]	A. Rothermel, R. Kurz, M. Rüffer, , W. Weigel, , H. G. Jahnke, A. K. Sedello, H. Stepan, , R. Faber , K. Schulze-Forster and A. A. Robitzki, “Cells on a chip - The use of electric properties for highly sensitive monitoring of blood-derived factors involved in angiotensin II type 1 receptor signalling,” Cellular Physiology and Biochemistry, Vol. 16, Issue 1-3, pp. 51-58, 2005.
[118]	M. Brischwein, S. Herrmann, W. Vonau, F. Berthold, H. Grothe and E. R. Motrescu, “Electric cell-substrate impedance sensing with screen printed electrode structures,” Lab on a Chip, Vol. 6, Issue 6, pp. 819-822, 2006.
[119]	M. J. Madou, Fundamentals of Microfabrication, Washington DC, CRC press, 1997.
[120]	H. M. Tong, L. Mok, K. R.Grebe, H. L. Yeh, K. K. Srivastava and J. T. Coffin, “Parylene encapsulation of ceramic packages for liquid nitrogen application,” Proceedings of Electronic Components and Technology Conference, Vol. 1, pp.345~350, 1990.
[121]	E. M. Charlson, E. J. Charlson and R. Sabeti, “Temperature selective deposition of Parylene-C,” IEEE Transactions on Biomedical Engineering, Vol. 39, Issue 2, pp. 202-206, 1992.
[122]	R. Olson and J. Yira, “Relative compatibility of parylene conformal coatings with no-clean flux residues,” IEEE/CHMT European International Electronic Manufacturing Technology Symposium, pp. 157-161, 1993.
[123]	G. R. Yang, S. Ganguli, J. Karcz, W. N. Gill and T. M. Lu, “ High deposition rate parylene film,” Journal of crystal growth, Vol. 183, Issue 3, pp. 385-390, 1998.
[124]	X. Yang, J. M. Yang, Y. C. Tai and C. M. Ho, “Micromachined membrane particle filters,” Sensor and Actuators A, Vol. 73, Issue 1-2, pp. 184-191, 1999.
[125]	X. O. Wang and Y. C. Tai, “Normally closed in-channel micro check valve,” Proceedings of the IEEE MEMS 2000, pp. 68-73, 2000.
[126]	M. Bera, A. Rivaton, C. Gandon and J. L. Gardette, “Comparison of the photodegradation of parylene C and parylene N,” European Polymer Journal, Vol. 36, Issue 9, pp. 1765-1777, 2000.
[127]	T. J. Yao, K. Walsh and Y. C. Tai, “Dielectric charging effects on parylene electrostatic actuators,” Proceeding of IEEE MEMS 2002, pp. 614-617, 2002.
[128]	J. Noordegraaf and H. Hull, “C-shield parylene allows major weight saving for EM shielding of microelectronic,” The First IEEE International Symposium on Polymeric Packaging, pp. 189-196, 1997.
[129]	http://www.scsalpha.com/indexus.htm
[130]	http://www.paryleneengineering.com/
[131]	G. W. Gross, B. K. Rhoades, H. M. E. Azzazy and M. C. Wu, “The use of neuronal networks on multielectrode arrays as biosensors,” Biosensors and Bioelectronics, Vol. 10, Issue 6-7, pp. 553-567, 1995.
[132]	R. Langer and J. P. Vacanti, “Tissue engineering,” Science, Vol. 260, No. 5110, pp. 920-926, 1993.
[133]	P. Fromherz, A. Offenhauser, T. Wetter and J. Weis, “A neuron-silicon junction: A retzius cell of the leech on an insulated-gate field-effect transistor,” Science, Vol. 252, No. 5010, pp. 1290-1290, 1991.